Plasma-assisted chemical vapour deposition of TiN and TiC on steel: Properties of coatings
- 1 November 1988
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 165 (1), 139-148
- https://doi.org/10.1016/0040-6090(88)90685-2
Abstract
No abstract availableKeywords
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