Ultrafine and Well-Defined Patterns on Silicon Through Reaction Selectivity
- 2 October 2002
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 14 (19), 1418-1421
- https://doi.org/10.1002/1521-4095(20021002)14:19<1418::aid-adma1418>3.0.co;2-s