Surface Modification of Sic by Ion Implantation
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Cross-Sectional Transmission Electron Microscopy of Defects in Beta Silicon Carbide Thin FilmsMRS Proceedings, 1985
- Changing the surface mechanical properties of silicon and α-Al2O3 by ion implantationJournal of Materials Science, 1984
- Surface softening in silicon by ion implantationJournal of Materials Science, 1984
- THE EFFECTS OF N2+ ION IMPLANTATION ON THE HARDNESS AND WEAR BEHAVIOUR OF BRITTLE MATERIALSPublished by Elsevier ,1982