Surface profile measurement using the confocal microscope
- 1 July 1982
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 53 (7), 5320-5322
- https://doi.org/10.1063/1.331391
Abstract
A novel high-resolution non-contacting optical method of surface profile measurement is described and typical results presented. The method utilizes the depth discrimination properties of the nonfocal scanning optical microscope.Keywords
This publication has 2 references indexed in Scilit:
- Imaging properties and applications of scanning optical microscopesApplied Physics A, 1980
- Depth of field in the scanning microscopeOptics Letters, 1978