Sharpening diamond tools having an apex angle of less than 60° with a low energy ion beam
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4), 696-699
- https://doi.org/10.1016/0168-583x(89)90877-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ultra fine finishing of diamond tools by ion beamsPrecision Engineering, 1987
- An algorithm to calculate secondary sputtering by the reflection of ions in two dimensionsVacuum, 1986
- Development of a general surface contour by ion erosion. Theory and computer simulationJournal of Materials Science, 1974
- The equilibrium topography of sputtered amorphous solids III. Computer simulationJournal of Materials Science, 1972