Advances in micro ultrasonic assisted lapping of microstructures in hard–brittle materials: a brief review and outlook
- 10 December 2004
- journal article
- Published by Elsevier in International Journal of Machine Tools and Manufacture
- Vol. 45 (7-8), 881-890
- https://doi.org/10.1016/j.ijmachtools.2004.10.018
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- Micromachining in the Third DimensionPublished by Springer Nature ,2002
- Machining of Precision Parts and MicrostructuresPublished by Springer Nature ,2002
- Micro-Cutting of Steel to Meet New Requirements in MiniaturizationCIRP Annals, 2001
- Ultraprecision Micro-Grinding of Germanium Immersion Grating Element for Mid-Infrared Super Dispersion SpectrographCIRP Annals, 2001
- State of the Art of MicromachiningCIRP Annals, 2000
- ULTRA-PRECISION GRINDING OF MICRO FRESNEL SHAPEPublished by World Scientific Pub Co Pte Ltd ,1999
- Manufacturing of microstructures using ultraprecision machine toolsPublished by SPIE-Intl Soc Optical Eng ,1999
- Three-Dimensional Micromachining by Machine ToolsCIRP Annals, 1997
- The micromilling process for high aspect ratio microstructuresMicrosystem Technologies, 1996
- Generation of Sculptured Surfaces by Means of an Ultraprecision Milling MachineCIRP Annals, 1993