Properties of New Low Dielectric Constant Spin-on Silicon Oxide based Polymers
- 1 January 1997
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Organic and Inorganic Spin-On Polymers for Low-Dielectric-Constant ApplicationsMRS Bulletin, 1997
- Materials Issues and Characterization of Low-k Dielectric MaterialsMRS Bulletin, 1997
- High-Resolution-Electron-Microscopy Investigation of Nanosize InclusionsMRS Bulletin, 1997
- Wetting on Grafted Polymer FilmsMRS Bulletin, 1997