The surface plasma treatments for fluorine-containing materials are summarized. The plasma-solid interactions are divided into two groups : the interaction of fluorocarbon polymers such as polytetrafluoroethylene, poly (vinyl fluoride), and poly (vinylidene fluoride) (PVdF) with plasmas of O2, He, Ar, etc., and the interaction of hydrocarbon polymers such as polyethylene and polypropylene with plasmas of F2, CF4, etc.. Particularly, the fluorination of polymers due to the latter interaction and changes caused in the surface properties are described in detail. A difference in the reactivity of PVdF and ethylene-propylene copolymer (EPDM) with CF4 and Ar plasmas is clarified using XPS data.