Fabrication of ferroelectric Bi4Ti3O12 thin films and micropatterns by means of chemical solution decomposition and electron beam irradiation
- 1 September 1997
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 18 (1-4), 311-318
- https://doi.org/10.1080/10584589708221708
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Micropatterning of Ferroelectric Bi 4Ti 3O 12 Using Electron-Beam-Induced Reaction of Metal Octylate FilmsJapanese Journal of Applied Physics, 1996
- Crystallization of Precursor Micropatterns of Ferroelectric Bi 4Ti 3O 12 Fabricated by Electron Beam ScanningJapanese Journal of Applied Physics, 1996
- Effects of O2 Gas Pressure in Heat Treatment on Surface Morphology and Electric Properties of Ferroelectric Bi4Ti3O12 Thin Films with c-Axis OrientationJapanese Journal of Applied Physics, 1995
- Fabrication of Ferroelectric Bi4Ti3O12 Thin Films by Dipping Pyrolysis of Metal Naphthenates and Micropatterns by an Electron BeamJapanese Journal of Applied Physics, 1994
- Electron-Beam-Induced Structuring of Composite Oxides by means of Dipping Pyrolysis of Metal Naphthenate FilmsJapanese Journal of Applied Physics, 1992
- New selective deposition technology by electron-beam induced surface reactionJournal of Vacuum Science & Technology B, 1986