Critical review of the epitaxial growth of semiconductors by rapid thermal chemical vapor deposition
- 1 June 1997
- journal article
- review article
- Published by Elsevier in Materials Science and Engineering: R: Reports
- Vol. 20 (1), 1-36
- https://doi.org/10.1016/s0927-796x(96)00196-9
Abstract
No abstract availableThis publication has 100 references indexed in Scilit:
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