Micromechanical precision pressure sensor incorporating SAW delay lines
- 1 September 2002
- journal article
- research article
- Published by Springer Nature in Acta Mechanica
- Vol. 158 (3-4), 227-252
- https://doi.org/10.1007/bf01176911
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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