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The Deposition of Silicon Films by Pyrolytic Decomposition of SiF2 Gas
Home
Publications
The Deposition of Silicon Films by Pyrolytic Decomposition of SiF2 Gas
The Deposition of Silicon Films by Pyrolytic Decomposition of SiF2 Gas
MJ
M. Janai
M. Janai
SA
S. Aftergood
S. Aftergood
RW
R. B. Weil
R. B. Weil
BP
B. Pratt
B. Pratt
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1 December 1981
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 128
(12)
,
2660-2665
https://doi.org/10.1149/1.2127324
Abstract
No abstract available
Cited by 13 articles