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Abstract: Laser chemical vapor deposition of metals and insulators
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Abstract: Laser chemical vapor deposition of metals and insulators
Abstract: Laser chemical vapor deposition of metals and insulators
SA
S. D. Allen
S. D. Allen
MB
M. Bass
M. Bass
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1 March 1979
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 16
(2)
,
431
https://doi.org/10.1116/1.569967
Abstract
No abstract available
Keywords
CHEMICAL VAPOR DEPOSITION
LASER CHEMICAL
INSULATORS
METALS
Cited by 32 articles