Solid immersion microscope
- 10 December 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (24), 2615-2616
- https://doi.org/10.1063/1.103828
Abstract
A new type of real‐time optical microscope has been developed that operates on the same principle as a liquid immersion microscope, with the liquid replaced by a solid lens of high refractive index material. Using a lens with an index n=2 and 436 nm illumination, this microscope has resolved 100 nm lines and spaces and has demonstrated a factor of two improvement in the edge response over a confocal microscope.Keywords
This publication has 6 references indexed in Scilit:
- Confocal Scanning Optical MicroscopyPhysics Today, 1989
- Real-time confocal scanning optical microscopeApplied Physics Letters, 1988
- Collection mode near-field scanning optical microscopyApplied Physics Letters, 1987
- Optical stethoscopy: Image recording with resolution λ/20Applied Physics Letters, 1984
- Development of a 500 Å spatial resolution light microscopeUltramicroscopy, 1984
- Electromagnetic diffraction in optical systems, II. Structure of the image field in an aplanatic systemProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1959