Dependence of film thickness on the heater geometry in vacuum coating technique
- 1 December 1971
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 4 (12), 1075-1076
- https://doi.org/10.1088/0022-3735/4/12/043
Abstract
Measurements of the thickness of evaporated films show marked variations with filament geometry and position of substrate from the values calculated assuming spherical symmetry of evaporation.Keywords
This publication has 1 reference indexed in Scilit:
- A control system for the evaporation of silicon monoxide insulating filmsJournal of Scientific Instruments, 1962