Plasma Synthesis of a Novel CF3-Dominated Fluorocarbon Film
- 1 January 1996
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 8 (9), 2212-2214
- https://doi.org/10.1021/cm960181x
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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