Pulsed plasma-enhanced chemical vapor deposition from hexafluoropropylene oxide: Film composition study
- 22 February 1998
- journal article
- research article
- Published by Wiley in Journal of Applied Polymer Science
- Vol. 67 (8), 1489-1502
- https://doi.org/10.1002/(sici)1097-4628(19980222)67:8<1489::aid-app14>3.0.co;2-x