Ion-beam-enhanced adhesion of Au films on Si and SiO2
- 1 March 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 7-8, 877-880
- https://doi.org/10.1016/0168-583x(85)90487-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Enhanced adhesion from high energy ion irradiationThin Solid Films, 1983
- Range and stopping-power tables for heavy ionsAtomic Data and Nuclear Data Tables, 1970