A specimen cooling stage for the scanning electron microscope

Abstract

The paper describes a specimen cooling stage for use in the scanning electron microscope based on the use of a miniature Joule-Thomson liquifier. Temperatures as low as 100 K can be reached in 4 min. The resolution is unimpaired even when working the liquifier under the highest gas flow rates. The major degrees of specimen movement are retained and the cooling system is easily installed in or removed from the specimen chamber. Little auxiliary apparatus is required and the running costs are minimal.