Summary Abstract: Effects of a cesium ion beam on GaAs, InP, and Si

Publisher Website

1 July 1987

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 5 (4), 1740-1741
https://doi.org/10.1116/1.574523

Abstract

No abstract available

Keywords

ION BEAM

Cited by 4 articles