Measurement and Thermodynamic Analyses of the Dielectric Constant of Epitaxially Grown SrTiO3 Films

Abstract

The dielectric constant was measured and analyzed for epitaxially grown SrTiO₃ thin films with thicknesses from 23 nm to 92 nm. A stronger applied bias field or a thinner dielectric film caused a decrease in the dielectric constant. Thermodynamic theory was introduced to explain these variations. Good agreement between the experimental results and theoretical calculations led to the conclusion that both the bias field dependence and thickness dependence is an intrinsic nature of SrTiO₃ thin film capacitors.