SrTiO3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties
- 1 September 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (9S)
- https://doi.org/10.1143/jjap.30.2193
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on siliconApplied Physics Letters, 1990