Structural and electrical properties of composite metal/hard carbon films prepared from metalorganics†
- 1 March 1991
- journal article
- Published by Taylor & Francis in International Journal of Electronics
- Vol. 70 (3), 527-531
- https://doi.org/10.1080/00207219108921305
Abstract
Composite metal/hard carbon films have been prepared by using metalorganic working gas mixtures in a radiofrequency driven plasma enhanced process. The film structure as observed by transmission electron microscopy and electron diffraction before and after heat treatment is described. Electrical conductivity versus temperature data are shown for one type of film.Keywords
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