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Early history of X-ray lithography at IBM
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Publications
Early history of X-ray lithography at IBM
Early history of X-ray lithography at IBM
ES
E. Spiller
E. Spiller
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1 May 1993
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 37
(3)
,
291-298
https://doi.org/10.1147/rd.373.0291
Abstract
No abstract available
Cited by 13 articles