A novel device for in situ experimental characterization and reliability analysis of DC-contact RF MEMS switches
- 6 May 2004
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Study of contacts in an electrostatically actuated microswitchPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Measurement and modelling of surface micromachined, electrostatically actuated microswitchesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Performance of microcontacts tested with a novel MEMS devicePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- RF MEMS switches and switch circuitsIEEE Microwave Magazine, 2001