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Publications
Effects of a thin SiO
2
layer on the formation of metal–silicon contacts
Home
Publications
Effects of a thin SiO
2
layer on the formation of metal–silicon contacts
Effects of a thin SiO
2
layer on the formation of metal–silicon contacts
SG
S. M. Goodnick
S. M. Goodnick
MF
M. Fathipour
M. Fathipour
DE
D. L. Ellsworth
D. L. Ellsworth
CW
C. W. Wilmsen
C. W. Wilmsen
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1 April 1981
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 18
(3)
,
949-954
https://doi.org/10.1116/1.570962
Abstract
No abstract available
Cited by 34 articles