Electron Bombardment Ion Source for Low Energy Beams
- 1 November 1968
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 39 (11), 1721-1723
- https://doi.org/10.1063/1.1683212
Abstract
A high current, electron bombardment ion source of simple design and suitable for low energy ion beam production is described. The source produces ion beams in the energy range from a few electron volts to several kilo‐electron volts with an energy spread of a fraction of 1 eV, with high current density (5 μA/cm2 at 25 eV), and without the problems associated with rf ion sources. The source has been used successfully to produce low energy beams of noble gas ions such as He+ and Ar+ without metastable contamination, as well as for H2+ and N2+.Keywords
This publication has 2 references indexed in Scilit:
- Gross Failure of the Conventional Adiabatic Criterion; Structure and Coherence in the Low-Energy Excitation of Helium Atoms by Helium IonsPhysical Review Letters, 1967
- Hyperfine Structure of the Metastable State of Singly Ionized Helium-3Physical Review B, 1958