Magnetically driven micropositioners

1 October 1985

journal article
letter
Published by AIP Publishing in Review of Scientific Instruments

Vol. 56 (10), 1970-1971
https://doi.org/10.1063/1.1138405

Abstract

Several designs are presented for micropositioners which use permanent magnets and current carrying coils to attain controlled displacements down to 5 nm while possessing a dynamic range of several centimeters. Angular displacements of less than 10⁻³ rad are also possible.

Keywords

POSITIONING
SAMPLE PREPARATION
ELECTRON MICROSCOPY
MAGNETS
MAGNET COILS
DESIGN
ELECTRON MICROSCOPES

This publication has 1 reference indexed in Scilit:

Low-temperature vacuum tunneling microscopy
Applied Physics Letters, 1984

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