Uniform-stress tungsten on x-ray mask membranes via He–backside temperature homogenization

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1 November 1994

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Vol. 12 (6), 4024-4027
https://doi.org/10.1116/1.587423

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Cited by 5 articles