A design overview of an eccentric-motion electrostatic microactuator (the wobble motor)
- 15 November 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (1-2), 1-16
- https://doi.org/10.1016/0250-6874(89)87096-9
Abstract
No abstract availableKeywords
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