Efficiency enhancement of diffractive optical elements by variable relief profiling
- 28 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4), 171-174
- https://doi.org/10.1016/0167-9317(94)00082-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Design and fabrication of synthetic lenses in siliconPublished by SPIE-Intl Soc Optical Eng ,1993