Construction, characterization and applications of a compact mass-resolved low-energy ion beam system
- 1 July 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 59-60, 316-320
- https://doi.org/10.1016/0168-583x(91)95231-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Transport optics for a space-charge broadening ion beamReview of Scientific Instruments, 1988
- Interactions of low energy reactive ions with surfaces. I. Dose and energy dependence of 3–300 eV C+, O+, and CO+ reactions with a Ni(111) surfaceThe Journal of Chemical Physics, 1988
- Reactive-Ion EtchingPhysics Today, 1986
- Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of depositsJournal of Vacuum Science and Technology, 1977