Study of initial dust formation in an Ar-SiH4 discharge by laser induced particle explosive evaporation

Abstract

The initial step of particulate growth in a dust forming low pressure radio‐frequency discharge has been studied in situ by laser induced particle explosive evaporation (LIPEE). With respect to the conventional light scattering, this method has been found much more efficient to observe small nanometer size particles, especially in the case of UVexcimer laserradiation. Experimental results interpreted by a simple model of laser‐particle interaction show that the intensity of LIPEE continuum emission depends on the particle radius roughly as r 4. This interaction is essentially different from Rayleigh scattering, as the latter varies as r 6. A study of time evolution of powder formation by LIPEE emission reveals the initial formation of nanometer size crystallites and the coalescence process leading to larger scale particles. It could be demonstrated that the critical step of dust formation is the initial clustering process leading to nanometer scale crystallites.