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TEM and X-Ray Analysis of Multilayer Mirrors and Beamsplitters
Home
Publications
TEM and X-Ray Analysis of Multilayer Mirrors and Beamsplitters
TEM and X-Ray Analysis of Multilayer Mirrors and Beamsplitters
DS
D. G. Stearns
D. G. Stearns
NC
N. M. Ceglio
N. M. Ceglio
AH
A. M. Hawryluk
A. M. Hawryluk
MS
M. B. Stearns
M. B. Stearns
AP
A. K. Petford-Long
A. K. Petford-Long
CC
C -H. Chang
C -H. Chang
KD
K. Danzmann
K. Danzmann
MK
M. Kuhne
M. Kuhne
PM
P. Muller
P. Muller
BW
B. Wende
B. Wende
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9 April 1987
proceedings article
Published by
SPIE-Intl Soc Optical Eng
Vol. 0688
,
91
https://doi.org/10.1117/12.964827
Abstract
No abstract available
Keywords
OPTICS
PHYSICS
MICROFABRICATION
MODELING
X RAY OPTICS
FABRICATION
SYNCHROTRON RADIATION
SPUTTER DEPOSITION
REFLECTIVITY
TRANSMISSION ELECTRON MICROSCOPY
LASERS
Cited by 9 articles