X-Ray Spectrometer Performance as a Function of Electron Probe Geometry

Abstract

Experimental data were gathered to determine the effect of sample orientation and electron beam incidence on x‐ray spectrometer performance. Dispersive counting techniques were used to compare results. The nature of the backscattered electron yield and the relationship to emitted x radiation is discussed. A wide selection of samples was used to study several wavelengths, including the ultrasoft x‐ray region. Analytical data include line‐to‐background ratios to show the results of various investigated parameters.