Synthesis of silicon nitride powder by gas-phase reaction
- 31 December 1991
- journal article
- Published by Elsevier in Journal of the European Ceramic Society
- Vol. 8 (3), 153-160
- https://doi.org/10.1016/0955-2219(91)90069-c
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Low‐Temperature Metal‐Organic Chemical Vapor Deposition of Silicon NitrideJournal of the American Ceramic Society, 1990
- Chemical vapour deposition of Si3N4 from a gas mixture of Si2Cl6, NH3 and H2Journal of Materials Science, 1986
- Synthesis of Silicon Nitride Powder from Silica ReductionJournal of the American Ceramic Society, 1982
- Chemical vapour-deposited silicon nitrideJournal of Materials Science, 1976
- Structural Approach to the Problem of Oxygen Content in Alpha Silicon NitrideJournal of the American Ceramic Society, 1975
- A mechanism for the nitridation of silicon powder compactsJournal of Materials Science, 1974
- The Synthesis of α-Si3N4Journal of the Ceramic Association, Japan, 1974
- Synthesis, Characterization, and Consolidation of Si3N4 Obtained from Ammonolysis of SiCl4Journal of the American Ceramic Society, 1973
- Finely Divided Silicon Nitride by Vapor Phase Reaction between Silicon Tetrachloride and AmmoniaJournal of the Ceramic Association, Japan, 1972
- Formation and reactivity of nitrides I. Review and introductionJournal of Chemical Technology & Biotechnology, 1968