Linearly Moving Ultrasonic Motor Using a Multi-Mode Vibrator

Abstract
This paper deal with the construction and some of the characteristics of linearly moving ultrasonic motors using multi-mode vibrators; a thin rectangular plate vibrator of the 1st longitudinal and 4th bending modes, and a piezo-ceramics annular plate vibrator of the 1st radial and ((1, 1)) non-axisymmetric modes are utilized. Key points in the design of the multi-mode vibrators and experimental characteristics of the motor such as its efficiency are discussed.