Simple piezoelectric translation device
- 1 February 1988
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 59 (2), 368-369
- https://doi.org/10.1063/1.1140206
Abstract
We describe a piezoelectric device which allows continuous movement and high‐resolution micropositioning, without distance limitation. Both mechanical construction and the electronics for the device are very simple. The movement is obtained via a stick‐slip mechanism, and steps as small as 10 nm are obtained. A displacement speed of 0.4 mm/s has been attained, and the device was capable of carrying several times its own weight, exerting a horizontal force, or climbing a plane inclined by 7°. Due to its compact construction, the device shows prospects for miniaturization.Keywords
This publication has 2 references indexed in Scilit:
- Dynamic piezoelectric translation devicesReview of Scientific Instruments, 1987
- Piezodriven spindle for a specimen holder in the vacuum chamber of a scanning electron microscopeReview of Scientific Instruments, 1986