Structural macro-defects in 6H-SiC wafers
- 1 September 1993
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 132 (3-4), 504-512
- https://doi.org/10.1016/0022-0248(93)90078-b
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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