A thin-film capacitance humidity sensor
- 1 January 1981
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 2, 171-186
- https://doi.org/10.1016/0250-6874(81)80036-4
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Solid-state humidity sensorsSensors and Actuators, 1982
- Characteristics of a Surface Conductivity Moisture Monitor for Hermetic Integrated Circuit Packages8th Reliability Physics Symposium, 1979
- Pressure-humidity apparatusJournal of Research of the National Bureau of Standards, 1952