Friction effects in the deflection of atomic force microscope cantilevers

Abstract

The conventional deflection‐mode atomic force microscope operates by optically monitoring the slope near the end of a microcantilever in contact with the sample surface. This signal is usually interpreted as a measure of height change. Lateral forces from friction, surface geometry, or inclination of the cantilever to the surface also affect the slope due to cantilever buckling. We calculate the deflection of a hollow triangular model cantilever subject to both lateral and normal forces. The measured response of the servo circuit to an inclined, loaded cantilever is then determined. This shows (1) errors are always present in height measurements of structures on inhomogeneous surfaces; (2) the sensitivity to buckling can be reduced by repositioning the laser; (3) friction measurements can be accurately made by scanning in two directions and applying the proper calibration.