Dependence of the Saturation of Light-Induced Defect Density in a-Si:H on Temperature and Light Intensity

Abstract
We studied the temperature and intensity dependence of the saturated density of light-induced defects (N sat) in hydrogenated amorphous silicon (a-Si:H), established by high-intensity Kr+ laser illumination. The saturation value is insensitive to temperature below about 90°C. Above 90°C, N sat drops with increasing temperature. This behavior can be explained within the defect pool model by a limited number of defect sites coupled with the concept of defect equilibrium. The experimental data suggest that the tail states do not direcily affect N sat in device-quality a-Si:H.