Compensation structures for convex corner micromachining in silicon
- 1 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3), 1036-1041
- https://doi.org/10.1016/0924-4247(90)87085-w
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A new uniaxial accelerometer in silicon based on the piezojunction effectIEEE Transactions on Electron Devices, 1988
- Micromechanics: A silicon microfabrication technologyMicroelectronic Engineering, 1985
- Three-dimensional structuring of silicon for sensor applicationsSensors and Actuators, 1983
- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978