R.F.-plasma system for the production of ultrafine, ultrapure silicon carbide powder
- 1 November 1983
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 18 (11), 3190-3194
- https://doi.org/10.1007/bf00544142
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The synthesis of ultrafine titanium nitride in an r.f. plasmaJournal of Materials Science, 1979
- The induced plasma torch as a high‐temperature chemical reactor. I. Oxidation of silicon tetrachlorideJournal of Chemical Technology & Biotechnology, 1969