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Lubrication properties of r.f. sputtered MoS2 layers with variable stoichiometry
Home
Publications
Lubrication properties of r.f. sputtered MoS2 layers with variable stoichiometry
Lubrication properties of r.f. sputtered MoS2 layers with variable stoichiometry
HD
H. Dimigen
H. Dimigen
HH
H. Hubsch
H. Hubsch
PW
P. Willich
P. Willich
KR
K. Reichelt
K. Reichelt
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1 December 1979
journal article
Published by
Elsevier
in
Thin Solid Films
Vol. 64
(2)
,
221
https://doi.org/10.1016/0040-6090(79)90513-3
Abstract
No abstract available
Keywords
LUBRICATION PROPERTIES
R.F
VARIABLE STOICHIOMETRY
SPUTTERED MOS2
MOS2 LAYERS
Cited by 33 articles