On the determination of the spatial distribution of deep centers in semiconducting thin films from capacitance transient spectroscopy
- 1 March 1982
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 53 (3), 1809-1811
- https://doi.org/10.1063/1.330683
Abstract
It is pointed out that a widely used simple formula may give rise to serious errors in profiling deep level concentrations from capacitance transient experiments. A correction formula is derived based on the space‐charge analysis.Keywords
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