Depth distribution of energy deposition by ion bombardment
- 28 February 1974
- journal article
- Published by Elsevier in Computer Physics Communications
- Vol. 7 (2), 85-94
- https://doi.org/10.1016/0010-4655(74)90043-5
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Comparison of displacement rates produced by ion bombardment and neutron irradiationRadiation Effects, 1971
- Simulation of high fluence fast neutron damage with heavy ion bombardmentRadiation Effects, 1971
- The Influence of the Amorphous Phase on Ion Distributions and Annealing Behavior of Group III and Group V Ions Implanted into SiliconJournal of the Electrochemical Society, 1971