Surface Micromachined Angular Rate Sensor
- 1 February 1995
- proceedings article
- Published by SAE International
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Micromachined gyroscopesSensors and Actuators A: Physical, 1994
- High aspect ratio electroplated microstructures using a photosensitive polyimide processPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- The Theory of a Piezoelectric Disc GyroscopeIEEE Transactions on Aerospace and Electronic Systems, 1986