Characterization of a 1 kA vacuum arc plasma gun for use as a metal vapour deposition source
- 10 December 1990
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 43-44, 1024-1034
- https://doi.org/10.1016/0257-8972(90)90041-a
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Excited-state densities in a multicathode-spot Al vacuum arc. II. Theoretical approachJournal of Applied Physics, 1980
- On sputtering in vacuum arcsJournal of Physics D: Applied Physics, 1979
- Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum AmbientJournal of Applied Physics, 1969