Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700 °C
- 1 September 1989
- Vol. 133 (1), 107-123
- https://doi.org/10.1016/0043-1648(89)90117-8
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Mechanical strength and tribological behavior of ion-beam-deposited boron nitride films on non-metallic substratesSurface and Coatings Technology, 1987
- Tribological properties of boron nitride synthesized by ion beam depositionJournal of Vacuum Science & Technology A, 1985
- Role of GaAs surface cleaning in plasma deposition of silicon nitride films for encapsulated annealingJournal of Vacuum Science & Technology A, 1985
- Review on wear research — activities in the F.R.G.Wear, 1984
- Adhesion, friction and wear of thin hard coatingsWear, 1984
- Ceramic coatings in the war on wearWear, 1984
- Cutting tool materials coated by chemical vapour depositionWear, 1984
- Friction, Deformation and Fracture of Single-Crystal Silicon CarbideA S L E Transactions, 1979